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Azbil Micro Flow CMS9500 - X84; Installing the Flowmeter

Azbil Micro Flow CMS9500
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11
Chapter 3. Mounting and Wiring
Installing the flowmeter
CAUTION
Mount this device horizontally.
If it is mounted vertically, drift may occur when the flow rate is zero, resulting in an
erroneous measurement.
Do not mount with the top surface facing down.
Doing so might cause measurement error or device failure.
z
Mounting orientation
z
Installation
There are two methods of mounting the flowmeter:
(1) Attach the flowmeter using the mounting screw holes on the bot-
tom, working from the bottom of the device. Two or four screws
are used depending on the model.
Massflow
X10L
L/min
EV2
EV1
ENTMODEDISP
RIGHT
RIGHT
WRONG
Hole dimensions when mounted directly
Unit: mm
48
27
4.5
48
15
4.5
80
30
5.5
CMS9500/0002/0005/0020/0050
CMS0200
CMS0500

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