Azbil Micro Flow CMS9500 - X84; Korea Certification Mark

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Chapter 6. Specifications
Gas type
CMS0050 CMS0200
Maximum mea-
surable flow rate
[L/min]
Output voltage
[V]
Setting and dis-
play resolution
[L/min]
Maximum mea-
surable flow rate
[L/min]
Output voltage
[V]
Setting and dis-
play resolution
[L/min]
Air/nitrogen 50 5 0.1 200 5 1
Argon 50 5 0.1 200 5 1
Carbon dioxide (CO
2
) 25 2.5 0.1 100 2.5 1
Oxygen*
2
50 5 0.1 200 5 1
Fuel gas 13A 40 4 0.1 150 3.75 1
Methane 50 5 0.1 200 5 1
Propane 14 1.4 0.1 50 1.25 0.5
Butane 12 1.2 0.1 50 1.25 0.5
User-specied *
1
5 0.1 *
1
5 1 *
3
Gas type
CMS0500
Maximum mea-
surable flow rate
[L/min]
Output voltage
[V]
Setting and dis-
play resolution
[L/min]
Air/nitrogen 500 5 1
Argon 500 5 1
Carbon dioxide (CO
2
) 250 2.5 1
Oxygen*
2
500 5 1
Fuel gas 13A 400 4 1
Methane 500 5 1
Propane 140 1.4 1
Butane 120 1.2 1
User-specied *
1
5 1
*1. Users can set the conversion factor from 0.100 to 8.000.
The maximum measurable ow rate for each model is shown below.
CMS9500: 500 (mL/min) × gas type conversion factor
CMS0002: 2 (L/min) × gas type conversion factor
CMS0005: 5 (L/min) × gas type conversion factor
CMS0020: 20 (L/min) × gas type conversion factor
CMS0050: 50 (L/min) × gas type conversion factor
CMS0200: 200 (L/min) × gas type conversion factor
CMS0500: 500 (L/min) × gas type conversion factor
*2. Only for oxygen models
*3. If the gas type conversion factor is 0.100 to 0.499, the display and resolution are as follows:
CMS0002: 0.005 (L/min)
CMS0020: 0.05 (L/min)
CMS0200: 0.5 (L/min)
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Korea certification mark