Azbil Micro Flow CMS9500 - Page 40

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Chapter 6. Specifications
z
Maximum measurable flow rate and output voltage for various gas types
The tables below show output corresponding to the maximum mea-
surable flow rate when 0–5 V analog output scaling is selected.
Gas type
CMS9500 CMS0002
Maximum mea-
surable flow rate
[mL/min]
Output voltage
[V]
Setting and dis-
play resolution
[mL/min]
Maximum mea-
surable flow rate
[L/min]
Output voltage
[V]
Setting and dis-
play resolution
[L/min]
Air/nitrogen 500 5 1 2 5 0.01
Argon 500 5 1 2 5 0.01
Carbon dioxide (CO
2
) 250 2.5 1 1 2.5 0.01
Oxygen*
2
500 5 1 2 5 0.01
Fuel gas 13A 400 4 1 1.5 3.75 0.01
Methane 500 5 1 2 5 0.01
Propane 140 1.4 1 0.5 1.25 0.005
Butane 100 1 1 0.4 1 0.005
User-specied *
1
5 1 *
1
5 0.01 *
3
Gas type
CMS0005 CMS0020
Maximum mea-
surable flow rate
[L/min]
Output voltage
[V]
Setting and dis-
play resolution
[L/min]
Maximum mea-
surable flow rate
[L/min]
Output voltage
[V]
Setting and dis-
play resolution
[L/min]
Air/nitrogen 5 5 0.01 20 5 0.1
Argon 5 5 0.01 20 5 0.1
Carbon dioxide (CO
2
) 3.3 3.3 0.01 10 2.5 0.1
Oxygen*
2
5 5 0.01 20 5 0.1
Fuel gas 13A 4 4 0.01 15 3.75 0.1
Methane 5 5 0.01 20 5 0.1
Propane 1.7 1.7 0.01 5 1.25 0.05
Butane 1.25 1.25 0.01 5 1.25 0.05
User-specied *
1
5 0.01 *
1
5 0.1 *
3