Azbil Micro Flow CMS9500 - Page 39

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Chapter 6. Specifications
CMS0020 CMS0050 CMS0200 CMS0500
4-digit 7-segment LED (the instantaneous ow rate and totalized ow displays can be switched)
0.1 L/min (0.05 L/min)*
8
0.1 L/min 1 L/min (0.5 L/min)*
8
1 L/min
0.1 L/min (0.05 L/min)*
8
0.1 L/min 1 L/min (0.5 L/min)*
8
1 L/min
1 L 10 L
0 to 99999999
Data is written to memory every 10 minutes. (The totalized ow can be reset by the keys or external contact input.)
Instantaneous ow rate LED indicator, totalized ow LED indicator, event LED indicators
If 0–5 or 1–5 V DC is selected: Allowable load resistance is 250 kΩ min.
Even if the measurement range is exceeded, the output remains less than 6 V.
If 4–20 mA DC is selected: Allowable load resistance is 300 Ω max.
Even if the measurement range is exceeded, the output remains less than 24 mA.
Selection of 0–2, 0–5, 0–10,
and 0–20 L/min
Default setting: 0–20 L/min
Selection of 0–10, 0–20,
0–30, and 0–50 L/min
Default setting: 0–50 L/min
Selection of 0–20, 0–50,
0–100, and 0–200 L/min
Default setting: 0–200 L/min
Selection of 0–100, 0–200,
0–300, and 0–500 L/min
Default setting: 0–500 L/min
2
Open collector (absolute maximum rating: 30 V DC, 50 mA)
100 ms ±10 %
1, 10, or 100 L per pulse 10, 100, or 1000 L per pulse
1
Circuit type of other device: Non-voltage contacts or open collector
Terminal voltage (contacts OFF): 4.5 ±1 V
Terminal current (contacts ON): approx. 0.5 mA (current to contacts)
Allowable ON contact resistance: 250 Ω
Allowable OFF contact resistance: 100 kΩ min.
Allowable ON residual voltage: 0.8 V max. (for open collector)
Allowable OFF leakage current: 50 μA max. (for open collector)
Air/nitrogen, argon, carbon dioxide (CO
2
), oxygen (for oxygen models only) , fuel gas 13A (46 MJ), 100 % methane,
100 % propane, 100 % butane, and fuel gas 13A (45 MJ) (switching by the device keys)
Specify the gas type conversion factor within a range of 0.100 to 8.000 by the keys.
Harness with dedicated connector (sold separately)
Connector: DF-11-10DS-2C made by Hirose Electric Co. Ltd.
EN 61326-2-3: 2006, EN 61326-1: 2006
Approx. 800 g Approx. 1400 g Approx. 2000 g
*4. Only for oxygen models: CMS_ _ _ _ B _ _ S _ _ _ 1 _ _
*5. Accuracy for air/nitrogen and oxygen (for oxygen models).
*6. This is the amount of ow rate change at 101.325 kPa with 23 °C as the reference point.
*7. This is the amount of ow rate change at 23 °C with 101.325 kPa as the reference point.
*8. When the gas type conversion factor is set to 0.100 to 0.499
*9. Analog output scaling can be changed by using the keys. If the gas type is changed, the ow rate measurement range
changes accordingly, as shown in the table above. However, with this function, analog output is scaled according to
the analog output scaling setting even if the gas type is changed.