Azbil Micro Flow CMS9500 - X84; External Dimensions

34
Chapter 6. Specifications

External dimensions
The engineering drawings below show the CMS_ _ _ _B with left-to-
right flow direction.
The CMS_ _ _ _R with right-to-left flow direction has the same
dimensions.
z
SUS model CMS9500/0002/0005/0020/0050B
Unit: mm
z
SUS model CMS0200B
Unit: mm
M4 threaded holes (2), 5 mm deep (for retaining screws)
X10L
L/min
EV2
EV1
ENTMODEDISP
Mass Flow Meter
MADE IN JAPAN
Azbil Corporation
37
32
17
15.7
15.7
91
69.1
(7.5)
(48.7)
18.5
(58)
(75)
(48)
(58)
(4.5)
21.5
7.5
*Optional part (sold separately)
Harness with dedicated connector:
model No. 81446594-ITEM
Mounting bracket:
model No. 81446721-001
Connector*: DF11-10DP-2DS,
made by Hirose Electric Co., Ltd.
Connection threads
: Rc 1/4 (2)
Harness with dedicated
connector
Mounting bracket
48 0.3
15 0.3
X10L
L/min
EV2
EV1
ENTMODEDISP
Mass Flow Meter
Azbil Corporation
MADE IN JAPAN
Connection thread:
Rc 1/2 (2)
(90)
(78)
(75) (63)
(4.5)
98.6
18.718.7
82.1
23.2
45
(62)
50
Connector*: DF11-10DP-2DS,
made by Hirose Electric Co., Ltd.
(7.5)
25.3
13.5
M4 threaded holes (4), 6 mm deep (for retaining screws)
*Optional part (sold separately)
Harness with dedicated connector:
model No. 81446594-ITEM
Mounting bracket:
model No. 81446721-001
48 0.3
27 0.3
Harness with dedicated
connector
Mounting
bracket