Azbil Micro Flow CMS9500 - Page 43

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Chapter 6. Specifications
z
SUS model CMS0500B
Unit: mm
z
SUS316 model CMS9500/0002/0005/0020/0050B
Unit: mm
Azbil Corporation
MADE IN JAPAN
X10L
L/min
EV2
EV1
ENTMODEDISP
Mass Flow Meter
9.3
15
29.5
59
(75.5)
(8)
60
98.6
16.4 16.4
96.1
(87)
(92)
(75)
(5.5)
M5 threaded holes (4), 8 mm deep (for retaining screws)
Connection thread: Rc 1/2 (2)
30 0.3
80 0.3
Connector*: DF11-10DP-2DS,
made by Hirose Electric Co., Ltd.
*Optional part (sold separately)
Harness with dedicated connector:
model No. 81446594-ITEM
Mounting bracket:
model No. 81446721-001
(80 0.3)
Harness with
dedicated connector
Mounting
bracket
MADE IN JAPAN
Azbil Corporation
MADE IN JAPAN
Azbil Corporation
X10L
L/min
EV2
EV1
ENTMODEDISP
Mass Flow Meter
MADE IN JAPAN
Azbil Corporation
MADE IN JAPAN
Azbil Corporation
15 0.3
37
32
17
15.7
15.7
91
69.1
(7.5)
(48.7)
18.5
2-9/16-18UNF
(58)
(75)
(48)
(58)
(4.5)
21.5
7.5
HEX9/16
HEX21
(138.8)
(23.9)
(23.9)
(25.7)
(25.7)
(138)
23.5
23.5
Rc 1/4 ttings (2)
Compatible pipe:
Outer diameter: 1/4
Material: SUS316
1/4 Swagelok ttings (2):
SS-400-1-6STSC11
1/4 VCR connection type
(142.4)
1/4 Swagelok connection type
Rc 1/4 connection type
9/16-18 UNF connection type
1/4 VCR ttings (2):
SS-4-VCR-1-00032SC11
Material: SUS316
*Optional part (sold separately)
Harness with dedicated connector: model No. 81446594-ITEM
Mounting bracket: model No. 81446721-001
Connector*: DF11-10DP-2DS,
made by Hirose Electric Co., Ltd.
M4 threaded holes (2), 5 mm deep
(for retaining screws)
48 0.3
Harness with
dedicated connector
Mounting
bracket