Azbil Micro Flow CMS9500 - Page 44

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Chapter 6. Specifications
z
SUS316 model CMS0200B
Unit: mm
Azbil Corporation
MADE IN JAPAN
X10L
L/min
EV2
EV1
ENTMODEDISP
Mass Flow Meter
Azbil Corporation
MADE IN JAPAN
Azbil Corporation
MADE IN JAPAN
MADE IN JAPAN
Azbil Corporation
Rc 1/2 ttings (2)
*Optional Parts (sold separately)
Harness with dedicated connector: model No. 81446594-ITEM
Mounting bracket: model No. 81446721-001
2-3/4-16 UNF
(90)
(78)
(75) (63)
(4.5)
98.6
18.718.7
82.1
23.2
45
(62)
50
(7.5)
HEX26
(148.6)
25
25
(160)
(30.7)
(30.7)
HEX7/8
25.3
13.5
(161.6)
(31.5)
(31.5)
48 0.3
M4 threaded holes (4), 6 mm deep
(for retaining screws)
27 0.3
Connector*: DF11-10DP-2DS,
made by Hirose Electric Co., Ltd.
Compatible pipe: Outer diameter: 1/2
Material: SUS316
1/2 Swagelok ttings (2):
SS-810-1-8STSC11
1/2 VCR connection type
1/2 Swagelok connection type
Rc1/2 connection type
3/4-16 UNF connection type
1/2-VCR ttings (2):
SS-8-VCR-1-8STSC11 or equivalent
Material: SUS316
Harness with dedicated
connector
Mounting
bracket