Azbil Micro Flow CMS9500 - Page 45

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Chapter 6. Specifications
z
SUS316 model CMS0500B
Unit: mm
(25)
(25)
(31.5)
(31.5)
(161.6)
HEX 26
(160)
(30.7)
(30.7)
(148.6)
98.6
16.4
16.4
96.1
29.5
59
(75.5)
(8)
60
9.3
(92)
(87)
15
HEX7/8
(80)
(75)
(5.5)
X10L
L/min
EV2
EV1
ENTMODEDISP
Mass Flow Meter
1
2-3/4-16 UNF
Azbil Corporation
MADE IN JAPAN
Azbil Corporation
MADE IN JAPAN
Azbil Corporation
MADE IN JAPAN
Azbil Corporation
MADE IN JAPAN
1/2-VCR ttings (2):
SS-8-VCR-1-8STSC11 or equivalent
Material: SUS316
Connector*: DF11-10DP-2DS,
made by Hirose Electric Co., Ltd.
Rc 1/2 ttings (2)
Compatible pipe: Outer diameter: 1/2
Material: SUS316
1/2 Swagelok ttings (2):
SS-810-1-8STSC11
1/2 Swagelok connection type
1/2 VCR connection type
Rc 1/2 connection type
3/4-16 UNF connection type (standard)
*Optional Parts (sold separately)
Harness with dedicated connector:
Model No. 81446594-ITEM
Mounting bracket:
Model No. 81446856-001
80 0.3
M5 threaded holes (4), 8 mm deep
(for retaining screws)
30 0.3
Harness with dedicated connector
Mounting
bracket