Azbil Micro Flow CMS9500 - Page 49

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Chapter 6. Specifications
Primary pressure
0.5 kPa
100 kPa
300 kPa
500 kPa
700 kPa
10.0
15.0
20.0
25.0
30.0
35.0
40.0
45.0
50.0
0
5.0
0.0
1 20.5 1.5 2.5
Flow rate (L/min, standard)
Pressure loss (Pa)
CMS0002
Primary pressure
0.5 kPa
100 kPa
300 kPa
500 kPa
700 kPa
20.0
40.0
60.0
80.0
100.0
120.0
140.0
160.0
180.0
0
0.0
2 4 61 3 5
Flow rate (L/min, standard)
Pressure loss (Pa)
CMS0005
50.0
100.0
150.0
200.0
250.0
0
0.0
10 205 15 25
Flow rate (L/min, standard)
Pressure loss (Pa)
CMS0020
Primary pressure
0.5 kPa
100 kPa
300 kPa
500 kPa
700 kPa