Azbil Micro Flow CMS9500 - Page 50

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Chapter 6. Specifications
100.0
200.0
300.0
400.0
500.0
600.0
700.0
800.0
0
0.0
20 40 6010 30 50
Flow rate (L/min, standard)
Pressure loss (Pa)
CMS0050
200.0
300.0
400.0
500.0
600.0
700.0
800.0
0
100.0
0.0
100 200
50 150 250
Flow rate (L/min, standard)
Pressure loss (Pa)
CMS0200
500.0
1000.0
1500.0
2000.0
2500.0
0
0.0
200 400100 300 500 600
Flow rate (L/min, standard)
Pressure loss (Pa)
CMS0500
Primary pressure
1 kPa
100 kPa
300 kPa
500 kPa
700 kPa
Primary pressure
1 kPa
100 kPa
300 kPa
500 kPa
700 kPa
Primary pressure
3 kPa
100 kPa
300 kPa
500 kPa
700 kPa