7-2
Chapter 7. SPECIFICATIONS
Model No.
Item
MPC9500 MPC0002
Valve type Proportional solenoid valve
Valve operation Normally closed when de-energized (N.C.)
Standard full-scale flowrate
(nitrogen conversionvalue) *
1
0.500 L/min(standard) 2.00 L/min(standard)
Standard compatible gas types Air/Nitrogen, argon, carbon dioxide (CO
2
)
Note; The gas must be a dry gas not containing corrosive components
(chlorine, sulfur, acid).
The gas must also be a clean gas not containing dust or oil mist.
Control Control range *
1
4 to 100 % FS *
1
Response Within 1.0 s (typ) to set point ± 2 % FS
Accuracy ±2 % FS max. (at standard temperature and differential pressure)
Repeatability ±1 % FS max.
Temperature influence A maximum of 0.1 % FS per °C
Pressure influence
(per 0.1 MPa
Q: flowrate)
Q ≥ 40 % FS 0.7 % FS max. 0.4 % FS max.
10 % FS ≤ Q < 40 % FS
1.2 % FS max. 0.7 % FS max.
Q < 10 % FS 2 % FS max. 1.2 % FS max.
Pressure Standard differential pressure 0.2 MPa [290 PSI] (Inlet pressure: 0.2 MPa [290 PSI] (gauge),
outlet pressure: 0.0 MPa [0 PSI] (gauge))
Required dierential pressure *
2
0.05 MPa [72.5 PSI]
Operating dierential pressure
range *
3
0.3 MPa [435 PSI] max.
Pressure resistance 0.5 MPa [725 PSI] (gauge)
Tempera-
ture
Allowable operating temperature
range
-10 to +50 °C [14 to 122 °F]
(0 to 50 °C [32 to 122 °F] when RS-485 communication)
Allowable storage temperature
range
-10 to +60 °C [14 to 140 °F]
Humidity Allowable operating humidity range 10 to 90 % RH(no condensation allowed)
Flowrate
setup
Setup method (1)Key operation (2)External setup voltage input (only for the model
with analog I/O function) (3)Loader communication *
5
(4)RS-485
communications (only for the model RS-485 communications function)
*
6
Setup resolution *
1
Setup input voltage range 0 to 5 V DC/1 to 5 V DC (selectable by function setup), Input
impedance : 1 MΩ ±10 % (only for the model with analog I/O function)
Flowrate
display
Display method 7-segment LED 8 digits
(For the instantaneous flowrate display: 4 digits and for the setting
flowrate display:4 digits)
Indication resolution *
1
Indication accuracy ±2 % FS ±1 digit
(at standard temperature and differential pressure)
Integra-
tion
function
Indication range 0.00 to 999,999.99 L 0.0 to 9,999,999.9 L
Indication resolution 0.01 L 0.1 L
Data backup timing (1)At each 5 L count (1)At each 20 L count
(2)At each after 1 hour from the previous backup
Flowrate
output *
4
Output scale 0 to full-scale flowrate (scaling available)
Standard output voltage range 0 to 5 V DC/1 to 5 V DC
(selectable by function setup)