Bronkhorst®
Instruction Manual EL-FLOW® Select 9.17.099F8
separately mounted, to measure and control gas flows from 0,014…0,7 ml
n
/min up to 8…1670 l
n
/min N
2
-equivalent.
The standard control valves on Bronkhorst® mass flow controllers are suited for max. 64 or 100 bar pressure ratings. These
valves are normally closed and available up to Kv-values of 1.5. Normally open valves can also be supplied. Various other
valve constructions enable the controlling of flow rates at very low differential pressure or at high pressure (max. 200 or 400
bar).
All models of the EL-FLOW® Select series are equipped with a digital printed circuit board, featuring diagnostics, alarm and
counter functions, digital communication (RS232) and remotely adjustable control settings. These digital instruments offer
great flexibility thanks to the "multibus" concept, whereby the instruments can be equipped with an on-board interface
with DeviceNet™, PROFIBUS DP, PROFINET, Modbus, EtherCAT® or FLOW-BUS protocol.
EL-FLOW® Select instruments can be offered with optional Multi Fluid / Multi Range (MF/MR) functionality (to be specified
at the moment of ordering). This option offers greater flexibility for user selection of both flow ranges and gas types,
maintaining high accuracy and turndown range for measurement and control. Thanks hereto, users of these instruments
can rescale their instruments on site, saving time (and money) for mounting and dismounting. For the convenience of the
user, Bronkhorst has developed an easy-to-use software tool called FlowTune for changing the configuration of
instruments with activated Multi Fluid / Multi Range option.
This document also applies to EL-FLOW® Metal Sealed series mass flow meters/controllers. These instruments are
characterized by their unique, patented, metal-to-metal sealing construction with excellent resealing capability.
Furthermore, the instruments distinguish themselves by a high surface quality and are therefore especially suitable for
meeting the semiconductor and solar industry requirements as well as other high purity gas applications. The base blocks
of the mass flow meters and controllers have 1/4" face seal male (VCR) connections. EL-FLOW® Metal Sealed series are
available for ranges from 0.12…6 ml
n
/min up to 1…50 l
n
/min N
2
-equivalent and are suited for max. 64 or 100 bar pressure
ratings. The digital features of the EL-FLOW® Select series are also applicable for all metal sealed models.
1.4 Calibration
The EL-FLOW® Select is factory calibrated. Periodical inspection, recalibration or verification of the accuracy may be subject
to individual requirements of the end user.
Bronkhorst certifies that the instrument meets the rated accuracy. Calibration has been performed using measurement
standards traceable to the Dutch Metrology Institute (VSL).
Unless specified otherwise, EL-FLOW® Select instruments are Air or N
2
calibrated. The calibration is converted to the
customer’s fluid and conditions using a detailed conversion model. This conversion model provides all the fluid data and
calculations for the applicable process conditions and is also used for the optional Multi FLuid/Multi Range functionality of
the instrument.
1.5 Maintenance
The EL-FLOW® Select needs no regular maintenance if operated properly, with clean media, compatible with the wetted
materials, avoiding pressure and thermal shocks and vibrations. Units may be purged with a clean, dry and inert gas.
In case of severe contamination, cleaning the inside of the device may be required. After cleaning, recalibration of the
instrument is recommended.
Inexpertly servicing instruments can lead to serious personal injury and/or damage to the instrument or the system it is
used in. Servicing must therefore be performed by trained and qualified personnel. Contact your Bronkhorst representative
for information about cleaning and calibration. Bronkhorst has a trained staff available.
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