Functional description
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Mixing of SF
6
and CF
4
After having carried out the preparatory steps the mixing process can be started.
This process is only provided for mixing of larger gas quantities (> 5000 l norm volume). The flow of SF
6
and CF
4
is controlled so that the correct mixing ratio is generated. The mixture is monitored permanently
by the integrated SF
6
-monitoring system. When starting the process a certain time is needed until the
correct mixing ratio is generated. Thus the measured values are integrated and corrected until the value
has stabilized.
Procedure:
Setting of the desired mixing ratio on the operating panel
Attention: in case the mixing ratio should be modified the tank is to be emptied (see function
“Filling of the buffer tank“) and refilled with the correct mixing ratio with the “Filling of buffer tank“
function.
Setting of the filling pressure on the operating panel
Start of the mixing function (Mix Permanent)
If the set filling pressure is reached the function stops automatically.