Special functions for maintenance
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6. Recovery of filter
To open the filters for filter revision the filters must be depressurized beforehand. Check the pressure on
the gauge pos. 121 (observe the gauge on the filter).
Attention: Danger to life! Do not open the filters under pressure!
Attention: Do not connect any storage cylinder or storage vessel to pos. 103. The ball valve on
the integrated pressure vessel must be closed. The bottle valves on the integrated
cylinders must be closed as well.
1. Select the “6: Recovery of filter” function by means of the knob switch.
2. Connect an SF
6
gas cylinder to the coupling pos. 105 and open the cylinder valve and the filling
pressure reducer (pos. 181).
3. Start the function by pressing the green “I” key.
4. The cylinder pressure can be read on the gauge pos. 162 (at coupling pos. 105).
5. If the filter is recovered to the desired filling pressure (< 0.75 Torr) stop the function with the red “0”
key.
6. Check the pressure. The gauge on the filters has to indicate “0”.
7. Close the cylinder valve and uncouple the SF
6
cylinder.
Prior to opening the filter it must be flooded with ambient air.
1. Open the valve pos. 135 in manual operation (see chapter 2)
2. Open the filling pressure reducer pos. 181.
3. Open the venting ball valve pos. 201 and wait for pressure compensation.
4. Close the venting ball valve.
5. Close the solenoid valve pos. 135.
Danger
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