P.17
PM10U
EBARA
CORPORATION
Note 1) The gas ballast mechanism is an option.
Note 2) N2 supply pressure for N2 gas ballast mechanism
Note 3) Maximum water vapor pumping rate with gas ballast valve fully opened.
Note 4) Actual value may not be in the range depending on facility.
Note 5) This describes tolerable voltage range, and is not steady voltage.
Note 6) Do no use this product with over 250V even it is within the tolerable range.
Note 7) For more details about oversea safety standard, contact one of our sales offices listed
in the back.
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