P.16
PM10U
EBARA
CORPORATION
3.4 Product Specifications
Specification Table
EV-A03
Model
Item
EV-A03-1
(Single Phase 100V)
EV-A03-2
(Single Phase 200V)
EV-A03-3
(Three Phase 200V)
Max. Pumping Speed [50/60 Hz] 250 L/min
1.0 Pa Note1) w/ gas ballast OFF
Ultimate Pressure
10 Pa
Note1) w/ gas ballast ON
N2 Gas ballast Note2)
N2 supply pressure (Gauge press.)
Regulator set pressure
0.01 – 0.05 MPa
Max. Inlet Pressure Atmospheric pressure
Max. Back Pressure (Gauge press.) 3 kPa or less
Max. water vapor pumping rate
Note3) 250 g/h
Motor Rated Power 0.4 kW
Operating current [50/60 Hz]
(Primary current) Note4)
5.0 – 7.5 A 3.2 – 4.0 A 1.5 – 2.3 A
Inlet NW25 (Quick Flange)
Flange Size
Outlet NW25 (Quick Flange)
Publication Oil 0.12 litter (Synthetic oil)
Weight Approx. 23 kg
Size 210W x 385L x 250H
Atmosphere
temperature
15 to 30 deg. C
Operating
condition
Relative
Humidity
20 to 80%
(condensation must not exist)
Pollution Degree Pollution Degree 2
Maximum Operating Altitude 2000m
Utility Requirements
Voltage [50/60 Hz] 100-120 V 200-240 V 200-240 V
Tolerable voltage
fluctuation
Note5)
±10%
Note6)
±10%(Max 250V)
Power
Supply
Capacity 0.8 kVA
Note7)
Safety standard
NRTL(UL61010-1)
CE Marking