EBARA EV-A03 - Pumping Performance Curves

P.19
PM10U
EBARA
CORPORATION
3.6 Pumping Performance
0
50
100
150
200
250
300
350
400
1.0E-01
1.0E+00
1.0E+01 1.0E+02 1.0E+03
1.0E+04 1.0E+05
Pressure [Pa]
Gas ballast valve : OFF
Gas ballast valve : ON
Pumping speed [L/min]
Note) The gas ballast mechanism is an option.