EBARA EV-A03 - Page 37

P.37
PM10U
EBARA
CORPORATION
Atmospheric
1/4 tube
Fitting
N2
Photo 6.1 Gas ballast specifications
Inlet Outlet
Gas ballast valve
Photo 6.2 The pump of which gas ballast valve is installed
Gas ballast valve
：Close
Gas ballast valve
：Open
1/4 tube
Fitting
Check
valve
Valve
Fig 6.1 How to open-and-close the gas ballast valve