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Technical data
M518-00-880 Issue A
2.6 Air supply
2.7 Purge data
Nitrogen is a suitable purge gas for CXS/EH combination systems. If you want to use a different purge gas please
contact Edwards.
The CXS/EH Pumping combination system is fitted with the following purges as standard:
CXS high vacuum and low vacuum seal purges
EH booster gearcover purge
Medium-Duty and Medium-Duty-Plus CXS Pumps have, in addition to the standard purges, a gas ballast purge of max
34slm, and an inlet purge of 16slm.
There is one common nitrogen purge supply point for all purges on the CXS/EH Pumping combination system, see
Figure 1
Table 8 - Air supply
Description Rating Units
Air supply 5 - 10 barg
Table 9 - Purge data
Characteristics Rating Units
Purge gas supply pressure range 2.5 - 6.9 bar gauge
36 - 100 psi gauge
Purge gas supply quality ISO 8573
µm
Purge gas inlet connection 1/4 inch tube fitting
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