B344-21-880 Issue N
Page 10 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
2.1.2 C-model and F-model pumps
2.2 Pump fluid data
Note: Edwards Material Safety Data Sheets for the following fluids are available on request.
63/150C
100/300C
100/300F
160/700C
160/700F
250/2000C
Pumping speed
nitrogen 150 l s
-1
300 l s
-1
760 l s
-1
2130 l s
-1
hydrogen 225 l s
-1
535 l s
-1
1410 l s
-1
3200 l s
-1
Minimum backing pump displacement for
maximum throughput 6 m
3
h
-1
6 m
3
h
-1
12 m
3
h
-1
40 m
3
h
-1
Recommended backing pump RV5 RV5 or RV8 RV12 or E2M18 E2M40
Maximum pump pressure 1300 mbar
1.3 x 10
5
Pa
1300 mbar
1.3 x 10
5
Pa
1300 mbar
1.3 x 10
5
Pa
1300 mbar
1.3 x 10
5
Pa
Recommended pump fluid Santovac 5 Santovac 5 Santovac 5 Santovac 5
Fluid charge (dry) 60 ml 125 ml 250 ml 500 ml
Inlet connection, compatible with ISO63 ISO100/6 inch ISO160/8 inch ISO250
Backing connection NW10 NW25 NW25 NW40
Cooling water connection 6 mm compression
couplings
10 mm compression
couplings
Minimum cooling-water flow at 20
o
C42 l h
-1
60 l h
-1
115 l h
-1
180 l h
-1
Heater power 0.45 kW 0.65 kW 1.35 kW 2.25 kW
Mass
C-model 5 kg 9 kg 18 kg 46 kg
F-model - 10 kg 20 kg -
Dimensions See Figure 7
Fluid type Critical backing pressure Ultimate vacuum
Santovac 5 0.6 mbar 6.0 x 10
1
Pa 3 x 10
-8
mbar 3 x 10
-6
Pa
DC702 1.2 mbar 1.2 x 10
2
Pa 7 x 10
-6
mbar 7 x 10
-4
Pa
DC704EU 0.8 mbar 8.0 x 10
1
Pa 7 x 10
-8
mbar 7 x 10
-6
Pa
DC705 0.6 mbar 6.0 x 10
1
Pa 3 x 10
-8
mbar 3 x 10
-6
Pa
Edwards L9 0.6 mbar 6.0 x 10
1
Pa 3 x 10
-8
mbar 3 x 10
-6
Pa
Apiezon C 0.7 mbar 7.0 x 10
1
Pa 7 x 10
-8
mbar 7 x 10
-6
Pa
Fluid Type Flash point °C Auto-ignition point °C Molecular weight
Santovac 5 288 590 446
DC702 193 500 530
DC704EU 221 500 484
DC705 243 500 546
Edwards L9 241 370 407
Apiezon C 246 420 479