Edwards Diffstak 63/150 - Typical Pumping System: Diffstak 250;2000 Pumps

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Operation
B344-21-880 Issue N
Figure 19 - Typical pumping system: Diffstak 250/2000 pumps
1. High vacuum system
2. Air-admittance valve
3. High vacuum gauge head
4. Roughing-valve
5. Backing gauge head
6. Air-admittance valve
7. Rotary backing pump
8. Backing-valve
9. Diffstak pump
10. High-vacuum isolation-valve