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Edwards Diffstak 63/150 - High-Vacuum Isolation-Valve: Diffstak 63;150, 100;300 and 160;700 Pumps; High-Vacuum Isolation-Valve: Diffstak 250;2000 Pumps

Edwards Diffstak 63/150
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© Edwards Limited 2007. All rights reserved. Page 39
Edwards and the Edwards logo are trademarks of Edwards Limited.
Maintenance
B344-21-880 Issue N
Figure 20 - High-vacuum isolation-valve: Diffstak 63/150, 100/300 and 160/700 pumps
Figure 21 - High-vacuum isolation-valve: Diffstak 250/2000 pumps
1. Valve-shaft
2. Valve-shaft ‘O’ rings
3. Screw (3 off)
4. Valve-plate
5. Blanking-plate
6. Valve-plate seal
1. Needle roller-bearing
2. Valve-shaft ‘O’ rings
3. Valve-plate
4. Valve-shaft
5. Screw (4 off)
6. Blanking-plate
7. Valve-plate seal

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