Edwards Diffstak 63/150 - Typical Pumping System: Diffstak 63;150, 100;300 and 160;700 Pumps

B344-21-880 Issue N
Page 32 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Operation
Figure 18 - Typical pumping system: Diffstak 63/150, 100/300 and 160/700 pumps
1. High vacuum system
2. Air-admittance valve
3. High vacuum gauge head
4. Combined roughing and backing-valve
5. Backing gauge head
6. Air-admittance valve
7. Rotary backing pump
8. Diffstak pump
9. High-vacuum isolation-valve