A546–00–880 Issue C
Page 14 © Edwards Limited 2008. All rights reserved.
Edwards and the Edwards logo are trade marks of Edwards Limited.
Installation
Refer to Figure 2, items 16, 18 and 27. Use the following procedure to connect the inlet and exhaust of the iGX system
to your vacuum inlet and exhaust pipeline:
1. Remove the temporary cover or blanking plate from the inlet of the iGX system. Retain the nuts, bolts, washers
and blanking plate for future use. Retain the temporary cover for future use on non-contaminated pumps only.
2. Use the O-ring supplied and suitable nuts, bolts and washers (not supplied) to connect the inlet-flange (Figure 2,
item 16) of the iGX system to your vacuum system.
3. Use the NW25 trapped O-ring and clamp supplied to connect the exhaust outlet (Figure 2, item 27) on the
exhaust pipe, to your exhaust extraction system.
4. Use the NW16 trapped O-ring and clamp supplied to connect the interstage connection (Figure 2, item 18) if
fitted.
3.4 Connect to your factory extraction system (optional)
Refer to Figure 2, item 27.
3.5 Connect the nitrogen supply (if provided)
Ensure that your nitrogen supply conforms to the requirements given in the Technical Data Section. If it doesn’t
flow, the sensors may not operate correctly, the gas pipelines may become blocked or the iGX system may be
damaged.
Refer to Figure 2, item 21.
Note: For optimum nitrogen, ensure that your nitrogen supply complies with Table 2.
3.5.1 Flammable/pyrophoric materials
When flammable or pyrophoric materials are present within the equipment you must:
z Not allow air to enter the equipment
z Ensure that the system is leak tight
z Ensure that pumped gases do not enter their flammable range. This can be achieved by diluting flammable
gases/vapours or oxidisers in the pump by supplying sufficient inert gas purge, for example dilution with
nitrogen to below one quarter LEL (lower explosive limit) or, if that is not practical, to below 60% LOC
(limiting oxidant concentration).
z For further information please refer to Semiconductor Pumping Application Guide (Publication no. P411-00-
090) or contact Edwards: refer to the address page at the rear of this manual for details of your nearest
Edwards company.
You must obey the instructions and take note of any precautions given below to ensure that
pumped gases do not enter their flammable ranges.
To Next Page
Loading...
Need help?
General
