finetech FINEPLACER lambda - Maintenance; Preventive Maintenance; Maintenance - Duty of care; Positioning table maintenance position.

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FINEPLACER

lambda

Rev-Nr. 1.1

6 Maintenance

6.1 Preventive Maintenance

6.1.1 Maintenance - Duty of care

• Maintenance work should only be carried out by trained personnel

• Make sure that the machine is in a state where you cannot injure yourself:

Substrate Heating Modules and Chip Heating Modules must be deactivated

and cooled off, the positioning table has to be in a maintenance position.

Bonding Force Modules and Optics Shifting Module must be deactivated.

• Make sure no process file is loaded to avoid sudden activation of machine

parts

6.1.2 Positioning table maintenance position.

• Remove the heating plate or substrate support from the table, as well as all tray

holders and other objects.

• Mount the maintenace table support to the granite ground plate.

• Move the positioning table away from the operator towards the arm support and

then to the left until the magnet inside the base plate is visible (see illustration).

Turn off the machine. Clean the right side of the base plate. Turn on the

maschine.