Factor
The calibration factor is a variable used in the current-to-pressure
calculation. The default value is one. Changing this value will have a linear
relationship with respect to pressure. This setting can be changed, for
example, when calibrating the SPCe pressure to a known gauge pressure.
Figure 9. Factor
Pressure is calculated using the following current-to-pressure calculation:
Where:
▪ I - Current in amps.
▪ V - Voltage in volts. (SPCe is variable)
▪ U - Pressure units conversion factor (1 for Torr, 1.33 for mbar and 133 for Pascal).
▪ F - MPCe/LPCe programmed calibr
aon factor (typically set to 1)
▪ S - Congured pump size in l/s.
6.3. High voltage output menu (output)
Figure 10. Output
Note:
If an asterisk (*) is present, a pump size has not been entered into the controller.
Voltage
The Voltage parameter sets the output voltage. It can be set in the range of
3000 to 7000 V d.c. For ion pumps at 5 l/s or less, the default voltage is
5000 V d.c. For ion pumps larger than 5 l/s, the default voltage is 7000 V d.c.
Note:
The default voltage for ion pumps at 5 l/s or less but with 5 KV feedthrough is
7000 V d.c.
04/2021 - ©Gamma
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