HP 5528A User Manual

Model 5526A
Flatness Measurements
SECTION 9
FLATNESS MEASUREMENTS
CONTENTS
INTRODUCTION
OPERATING SPECIF I CA TIONS
HARDWARE REQU I RED
RELATED MEASUREMENTS
REFERENCE MATER I AL
INSTAllATION AND AUGNMENT OF OPTICS
MEASUREMENT DISPLAY SETT I NGS
MAKING A MEASUREMENT
WHAT AFFECTS ACCURACY?
INTRODUCTION
Flatness deviation ca n be calculated from angle information from the Angular Optics and from
the length dimensions of the Footspaclng Pads u se d. The HI) Dimensional Metrology Analysis
System programs cil lculate and pl ol flatness data for this application.
These measurements are be st suited for surface plates. since we u se the same method used with
autocollimators (sometimes referred to 3S the "Moody" method ).
In this User's Guide sec tion (Section 9). we describe how to se t up for and make a Flal rH !SS
measurement using the Angul ar Optics. See Appendix A for a description of the principles on
which this measurement
is based.
OPERATING SPECIFICATIONS
The following speci fi ca tions assume that the optional Dimensional Metrology Analysis System is
used in co njunction with the HP 5528A to ga Ther , analyze and plot flatness ca libration results and
that the temperature of all optical components is stabilized in the range 15-25°C. Values do not
include effects of surface cleanliness or operator
po sitioning repeatability.
Accur acy : ± O.2' .\) of displayed va lue.
R
eso lution (per step):
Table 9-1 Accuracy Term
FOOTSPACING ACCU RACY
DI MENS I ON TE RM
0. 03 micron
2 inches p.O mlcroinch)
0. 05 micron
<I inches (2.0 mlcroinch)
0.
08 micron
6
inches ( 3.0 microinch )
9-1

HP 5528A Specifications

General

Brand	HP
Model	5528A
Category	Measuring Instruments
Language	English