HP 5528A

Model 5528A
Flatness
Measurements
'~ -------------T . ------------~ C
H~ ------------ ~ ~------------1 0
~II
Fi8urc 9-5. Location of Laser I-lead
2.5 em
(1 .0 In .)
5. Place the Flatness Mirror wilhout the Angular In terferometer in co rner "C" in the la s er
beam's path , so its base is para ll el to edge "GE" and flush with the corner of the Surface Plate.
(See Figure 9-6 .)
SECOND FLATNESS
MIRROR
ANGULAR
INTERFEROMETER
~a=-=II =)
FOOTSPACER +
ANGULAR REFL EC TOR
~'RST FLATNESS MIRR OR
STRAIGHTEDGE
Figure 9-6 . Po sitioning of Optics for First Mc.l su rcmcnt Line
9-7