Model
5526A
Parallelism Measurements
14-2
First-Axis
Measurement
Installation
and
Alignment of Optics
In
sta
ll and align
your
optics
for
the first measurement
by
following
the instructions given in
Section
10
or
Section
11
of
this
Use
r
's
Guide.
1.
Move
ei
ther the
Interferometer
or
the Retroreflector.
2.
Try
to
manually remove
as
much
slope
as
possible. This will help make it easier
to
get
adequate beam strength
when
you make the second measurement.
Measurement
Di
splay Settings
Use the instructions given in Section
10
or
Section
11
of
this User's Guide.
Note
the
direction
of
po
sitive readings, by pressing s
li
ghtly
on
the Inte
rf
erometer. This will be
important
when
you measure the second axis.
Making A
Measurement
System Checks
Use the instructions
for
"S
YSTEM
C
HE
CK"
given in Section
10
or
Sec
tion
11
of
this User's Guide.
Procedure
If
you
us
e the
HP
Dimensional
Metrology
Analysis System, refer to its Operating Manual to
record and s
tore
the data
for
this first axis.
If you
don't
use
the
HP
Dimensional
Metrology
Analysis System,
follow
the instructions given in
Section
10
or
Section
11
of
thiS
User's
Guide.
Then refer to Section 21
of
thiS
User's Guide and
ca
lculate the sl
ope
of
your
measurement data.
Second
Axis
Measurement
Installation
and
Alignment of Optics
Make
any chan
ges
that are necessary to all
ow
the
Optic
(e
ither
the Interferometer
or
the
Reflector) that
didn't
move in the first measurement to move in the second measurement.
00
not
adjust the tilt of the Straightness Reflector.
Measurement
Display Settings
1.
Use the instructions given in Section
10
or
Section
11
of
this
Use
r
's
GUide.
2.
When
entering
va
lues
for
the
SET
UP keys, be sure you choose the co
rr
ect sign convention
for
DIR
SENSE.
The sign co
nvention
is
critical
in
a Parallelism measurement.
Make
sure that positive readings appear in the
same
direction
as
they
did
when you
measured the first
axi
s.
Pre
ss
s
lightl
y
on
the Interferomet
er
to
do
Ihi
s.
Study Figure
14
-1 and
Figure 14-2 to
see
the
importance
of
the slopes' sign directions.
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