HP 5528A User Manual

Model 5528A
Straightness Measurements ( Along A Horizontal Axis)
'0 -2
Meis ur eme nt Accuracy:
Sh ort Range Opti cs :
Temp erature
Displayed
Value
Range
0-10 microns
10-1500 microns
(0-400 microinchesl
(400-60000 mic roinchesl
'S - 2S ' C ±3. S%
1:' 1% +0.25 microns
(10 m ic roinches)
0-40°C
±
6%
± 1% ±O.S microns
( 20 m lc rolnches)
Lo
ng Range Opti cs:
Te mperatur e
Displayed
Value
Range
0-'00 microns
100-1500 microns
(0-4000 mlcrOinches) 14000-60000 m ic roinches)
15-25°C
±
S%
±2. S% ±2.5 microns
(100 microinches)
0-40°C ± 7. 5%
±2. S% ±5 microns
(200 mlcrolnches)
'This Is an~lol!ous to thc traditional s tr~ightcd gc and in di cator method of measuring malghtnl!!i s. where Opt ic al
Reference Accunley C OrrC)I>Ol1d s to the ~traighted8e a« war y. and Mc as wem en , A cc ur~ cy corrc~pond) to the
I ndl atto r ilccuracy.
2
0p,lcal refcrence error C ~n be elim in ated by using ~ tr.lllhtc-dgc Imillon reversal technique s.
RESOLUTION:
Short-Range:
Metric Units Mode : 0 .0 1 micron ( O'(X)OO l mm)
Engl
is h Uni ts Mo de: 1 rnicroinch
Long-Range:
Metri c Units Mode: 0. 1 micron (0. 0001 mm)
Eng lish Units Mode : 10 microinches
STRAIGHTNESS DEVIATION RANCE:
±1
.5 mm ( 0.060 inch)
AXIAL SEPARATION RANGE (Typical, with proper alignment. 15-25°C):
Distance
of travel between the Interferometer and Reflector. Interferometer
located
within 5 metres (16.5 (eet ) of laser Head.
Sh o rl - ROtnge: 0.1 -3 metres (4- 120 in ches )
Long-R Ot nge Opli cs : 1- 30 metres (3-1 00 feet)

HP 5528A Specifications

General

Brand	HP
Model	5528A
Category	Measuring Instruments
Language	English