Inficon VGC501 - Page 39

tina96e1-b (2016-12) VG
C
Deg
a
Editi
n
para
m
C
501_VGC502_VGC503.om
a
s
n
g and savi
n
m
eter
n
g a
Conta
m
instabili
t
the ele
c
Availabl
 Pira
n
 Pira
n
 Col
d
 Col
d
 Hot
 Hot
 Cap
 Hot
DEGAS
m
ination depo
s
t
ies of the me
c
trode system
.
The dega
s
BPG402 g
l
e for the follo
w
ni
ni
/
Capacita
n
d
cathode
d
cathode
/
Pi
r
ionization
/
Pi
ionization
/
Pi
acitance
ionization
/
Pi
DEGAS
OFF
DEGAS ON
s
its on the ele
c
asurement v
a
.
s
process wor
k
auges: The D
w
ing gauges:
n
ce
r
ani
rani
rani
rani
/
Capacit
a
I
F
I
I
 Start D
e
180 sec
Abort D
e
 Save c
h
c
trode system
lues. The de
g
k
s only at pre
s
e
gas function
(PSG)
(PCG)
(PEG,
M
(MPG)
(BPG)
(HPG)
(CDG)
a
nce (BCG)
Value
 Normal o
p
 Degas: T
h
heated to
bombard
m
system is
180 s.
e
gas. Duratio
n
o
nds (may al
s
e
gas.
ange and ret
u
of hot catho
d
g
as function f
a
s
sures belo
w
7
acts only up
o
MAG)
p
eration (Deg
a
h
e electron c
o
≈700 °C by e
m
ent and the
e
thus cleaned
.
n
of the Dega
s
s
o be aborted
)
u
rn to read m
o
d
e gauges ma
y
a
cilitates clea
n
7
.2×10
-6
mba
r
o
n the active f
i
a
s blocked)
o
llection grid i
s
lectron
e
lectrode
.
Duration =
s
function
)
.
o
de.
39
y
cause
n
ing of
r
.
i
lament.
s