Troubleshooting
31
Warning
5 Troubleshooting
When a malfunction occurs, the TURBOVAC is no longer driven and a fail ure
code is indicated.
The red LED ERROR lights permanently and one green LED within the chain
flashes.
After you have eliminated the cause of the failure, you can reset the malfunc-
tion signal with the STOP command (key or remote control).
Only qualified personnel or the Leybold Service Department may carry out
work on the frequency converter.
Potentially fatal voltages are present inside the frequency converter.
Open the frequency converter only after it has been isolated from the
mains power supply.
Symptom
Turbomolecular pump pro-
duces strong running noises
and vibrations.
Turbomolecular pump does
not attain its ultimate pres-
sure.
The running pump cannot
be stopped through the
keys or X1.
The pump cannot be started
through X1.
The pump cannot be
stopped through X1.
Probable Cause
Rotor imbalance.
Defective bearing
Defective measuring instrument.
Contaminated gauge head.
Leak at the apparatus, lines or the pump.
Contaminated pump.
Inadequate pumping speed of the backing
pump or ultimate pressure is too high.
Incorrectly programmed frequency parame-
ters.
The pump was started through the serial
interface.
The pump was stopped through the keys;
see Section 3.2.1.
The pump was started through the keys;
see Section 3.2.1.
Remedy
Have the rotor balanced.
Replace the bearing.
Check the measuring instrument.
Clean or replace the gauge head.
Leak search.
Clean the pump.
Check the ultimate pressure supplied via the
backing pump; if required installed a larger
backing pump.
Check the parameters.
Disconnect the AC supply or provide a serial
link and stop through bus.
At first give a stop command through X1,
then start.
At first give a start command through X1,
then stop.
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