XPS-D Controller User Interface Manual
3. If satisfied with the results, there is no need to tune the stage. If not satisfied, return to
the tuning page by clicking “Close” and move back to the start position.
4. Next to the Auto-tuning button, there is a Mode field for Auto-tuning. Select “Short
settling” or “High robustness”. Choose “Short settling” to improve the settling time
after a motion or to reduce the following error during the motion. Short settling will
define “high” PID vales for your stage, but there is a risk of oscillation. Choose
“High robustness” to improve the robustness of the motion system and to avoid
oscillations during or after a motion. “High robustness”, for instance, can avoid
oscillations for a rotation stage with high payload inertia.
When done with the selection, click Auto-tuning.
5. The stage vibrates for a couple of seconds. When done the following screen appears:
6. Press “OK” in the pop-up window, the proposed modifications are colored in red.
You must click “Set” to apply the new parameters. “Set” only changes the working
parameters without saving them. Recover the previous parameters by rebooting the
system.
7. To test the behavior of the motion system with the new parameters, repeat the same
data gathering and compare the results. Make manual changes to the settings if
necessary and verify the behavior.
8. To permanently save the settings to the stages.ini, press “SAVE TO FILE”. “SAVE
TO FILE” overwrites the current settings in your stages.ini. Press “SAVE TO FILE”
only when fully satisfied with the results. For recovery, Newport recommends
making a copy of the stages.ini with the old settings.
NOTE
For further information about the meaning of the different tuning parameters, see
Features Manual.
EDH0405En1012 – 09/18 16
To Next Page
Loading...
