Olympus MX61L - User Manual

ASSEMBLY/SETUP
MANUAL
This manual is for assembly and setup of the Olympus MX61/MX61L Semiconductor/FPD
Inspection Microscopes. To ensure the safety, obtain optimum performance and familiarize yourself
fully with the use of this microscope, we recommend that you study this manual thoroughly before
operating the microscope. As this manual will be needed when you replace the lamp or fuses or
modify a setup, retain it in an easily accessible place near the work desk for future reference.
A X 7 5 9 9
MX61/MX61L
200mm/300mm COMPATIBLE SEMICONDUCTOR/FPD
INSPECTION MICROSCOPES

Olympus MX61L Specifications

General

Focusing	Coaxial coarse and fine focusing knobs
Optical System	UIS2 (Universal Infinity System)
Type	Metallurgical Microscope
Stage	Mechanical stage
Magnification	50x to 1000x (depending on configuration)
Eyepiece	10x
Condenser	Abbe condenser
Power Supply	AC 100-240V, 50/60Hz
Objective Mount	Revolving nosepiece for multiple objectives

Summary

Safety Precautions

Microscope Nomenclature

Component Identification and Modules

Lists and illustrates various microscope parts, modules, and accessories.

Microscope Assembly Overview

Assembly Diagram and Required Tools

Provides an overview of the assembly steps and lists the tools required for setup.

Detailed Assembly Procedures

Attaching Stage and Limit Stopper

Instructions for attaching the stage and the Y-stroke limit stopper.

Installing Key Microscope Modules

Attaching Objectives, Nosepiece, and Tube

Guides for installing objectives, motorized revolving nosepiece, and observation tube.

Lamp Housing and Burner Installation

Attaching Lamp Housing and Mercury Burner

Burner Maintenance and Replacement

Burner Hour Counter and Replacement Procedure

Power Supply and High-Intensity Light Source Setup

Setting Up Power Supply and Attaching Lamp Housing

DIP Switch and PRESET Switch Configuration

Setting DIP Switches for Microscope Functions

Guide to configuring DIP switches for various microscope functions and their meanings.

Aperture Stop (AS) PRESET Switch Settings

AS Value Settings and Interlocking Operation

Instructions for setting AS values and details on their interlocked operation with objectives.

Reflected Light Aperture Iris Diaphragm Adjustment

Centering the Reflected Light Diaphragm

Mercury;Xenon Burner Centering

Burner Ignition and Centering Procedure

Steps for turning on the burner and performing the centering procedure.

Microscope Computer Control

RS-232 C Communication Parameters

Technical specifications for serial communication using the RS-232C interface.

RS-232 C Cable Connection and Pinout

Connecting the RS-232 C Cable and Pin Assignments

Communication Modes and Specifications

Command;Response Handling and Modes

Command Communication Sequences

Successful and Unsuccessful Communication Scenarios

Microscope Command List

Key Control Commands Overview

Lists essential commands for mode switching, nosepiece, and diaphragm control.

Objective and Aperture Iris Switching Commands

10 BA Command for Switching

Details on commanding objective rotation and aperture iris diaphragm setting.

Aperture Iris Diaphragm Control Commands

1 EAS Commands for Diaphragm Settings

Instructions for setting and querying the aperture iris diaphragm position.

Unit Status and Presence Checks

Commands for Checking Cube and Unit Status

Glare Prevention Control Commands

1 FPV Commands for Glare Prevention

Microscope Error Code Reference

Error Codes, Causes, and Remedies

Comprehensive list of error codes, their potential causes, and recommended troubleshooting steps.

Maintenance Parts and Consumables

Replacement Bulbs, Burners, Fuses, and Oil