14
XL laser system
XL-80 hardware XL-80 applications
Linear measurement optics
The linear measurement optics are used for measuring linear positional accuracy.
The linear displacement is measured by the difference between the interferometer
and retro-reflector. The targets are designed to mount directly onto the optics to
improve the alignment process.
1
Linear reflectors x 2
2
Beam splitter
3
Targets x 2
Angular measurement optics
The angular measurement optics are used to measure angular displacements,
particularly angular pitch and yaw. The angular displacement is achieved by
measuring the difference between the angular interferometer and retro-reflector.
1
Angular reflector
2
Angular interferometer
3
Targets x 2
1
2
3
1
2
3