RH CGS-240 - Page 87

Troubleshoot/Maintenance
CGS-240 Manual 6/15/2021
Page 87 of 148
6.2.1).
Check flow meter power
and connection (see section
6.2.1 or 6.6.6
240
[Tpu] Upper chamber port
temperature high
Upper chamber access port
temperature is too high.
Verify upper chamber
access port temperature.
Check upper chamber
access port temperature
sensor (Ch10) connection or
check temperature
measurement board (see
section 6.5.5 or 6.1.3).
Check upper access port
heater (see section 6.5.5).
241
[Tpc] Center chamber port
temperature high
Center chamber access port
temperature is too high.
Verify center chamber
access port temperature.
Check center chamber
access port temperature
sensor (Ch11) connection or
check temperature
measurement board (see
section 6.5.5 or 6.1.3).
Check upper access port
heater (see section 6.5.5).
242
[Tpl] Lower chamber port
temperature high
Lower chamber access port
temperature is too high.
Verify lower chamber
access port temperature.
Check lower chamber
access port temperature
sensor (Ch12) connection or
check temperature
measurement board (see
section 6.5.5 or 6.1.3).
244
[Tp] Presat temperature low
Pre saturator temperature is too low.
Verify pre saturator
temperature.
Check pre saturator
temperature sensor (Ch1)
connection or check
temperature measurement
board (see section 6.7 or
6.1.3).