RH CGS-240 - Temperature Calibration

Calibration
CGS-240 Manual 6/15/2021
Page 46 of 148
5.2 TEMPERATURE CALIBRATION
To maintain system accuracy, the following two temperature probes should be calibrated periodically.
The temperature probe calibrations should be performed as a system. The probes will be removed from
the insertion points of the CGS-240 but will remain connected to the electrical system. Both probes can be
run simultaneously.
Required Equipment
• Temperature readout with 0.01 °C or better resolution, temperature standard (SPRT
recommended) ± 0.03 °C or better accuracy.
• Temperature calibration bath, detailed in section 5.
• 7/16” deep access T-wrench (supplied with the system).
Adjustment is performed by altering the coefficient values to the CVD equation:
R = R0(1 + aT + bT
2
+ c(T-100)T
3
)
Default (uncalibrated) Temperature Coefficients and Expected Coefficient Ranges (post-adjustment):
Coefficient
Default
Acceptable Range
R0
100
99 < R0 < 101
a
0.0039083
0.0037 < a < 0.0041
b
-5.775E-7
-4.0E-7 > b > -7.5E-7
c
-4.183E-12
Exponent of coefficient c should be no larger than E-10. For
example, coefficients of E-10, E-11, E-12 and so on, are
acceptable, but E-9 would be outside of the acceptable range.
[Ts] Saturator Temperature Probe
[Tc] Chamber Temperature Probe