Table of contents
xi
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
Section 7 GAS PURGE
Section 8 TURBO MOLECULAR PUMP RECONDITION
8.1 Turbo Molecular Pump Return Request . . . . . . . . . . . . . . . . 40
8.2 Turbo Molecular Pump Decontamination. . . . . . . . . . . . . . . . 41
8.3 Touch-Down Bearing Replacement . . . . . . . . . . . . . . . . . . . . 41
8.4 Check of the rotor blades. . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Section 9 TROUBLESHOOTING
9.1 Vacuum Pressure Rise . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
9.2 Abnormal Noise and/or Vibration . . . . . . . . . . . . . . . . . . . . . . 44
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