Name: Shimadzu TMP-3403LMC
Brand: Shimadzu
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3.2　Principle of Turbo Molecular Pumping

Magnetically Levitated Turbo Molecular Pump

INSTRUCTION MANUAL

Fig.3-1　Pump Sectional Drawing

(1) High frequency motor (6) Spacer (11) Inlet flange

(2) Receptacle (7) Radial magnetic bearing (12) Outlet flange

(3) Drive shaft (8) Axial magnetic bearing (13) Protective net

(4) Rotor blade (9) Touch-down bearing (14) Cooling water pipeline

(5) Stator blade (10) Gap sensor 　 (pipe connection port)

①

③

④

⑩

⑭

⑫

⑬

⑪

⑤

⑥

⑨

⑦

②

⑨

⑧

⑩

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Shimadzu TMP-3403LMC Specifications

General