3.2 Principle of Turbo Molecular Pumping
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Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
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Fig.3-1 Pump Sectional Drawing
(1) High frequency motor (6) Spacer (11) Inlet flange
(2) Receptacle (7) Radial magnetic bearing (12) Outlet flange
(3) Drive shaft (8) Axial magnetic bearing (13) Protective net
(4) Rotor blade (9) Touch-down bearing (14) Cooling water pipeline
(5) Stator blade (10) Gap sensor (pipe connection port)
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