Shimadzu TMP-3403LMC - Page 46

6.4 Shutting Down
33
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
6
REFERENCE
ROTATION lamp goes out or "ROTATION" signal turns off when the pump rotational speed is
60rpm or less. Turning off the POWER switch permits the pump rotor to be supported by the
touch-down bearings.