Maintenance
6-2 ULVAC CRYOGENICS INCORPORATED
When disconnecting and reconnecting the self-sealing coupling, always use two spanners
as described in Section 3.4 and 5.1.
8. Remove the adsorber mounting bolt (M6).
9. Remove the adsorber from the compressor unit.
Depressurize the adsorber before disposing of it.
Always use the charging adapter to depressurize the adsorber.
◆Installing the Adsorber
1. Remove the dust caps from the self-sealing coupling halves at each end of the
replacement adsorber.
2. Install the replacement adsorber by following the steps for adsorber removal in
reverse order.
3. Connect the adsorber to the compressor internal piping.
4. Reinstall the rear panel.
5. Ensure that the helium pressure gauge reads 1.2±0.04MPaG. If the reading
pressure is higher than allowable range, let out the gas very slowly by loosen the
filling valve. If it is lower, add the gas by following the instructions in Section 6.3.
6. Write installation date and elapsed time on the adsorber label. Also write elapsed
time for the next replacement of adsorber (plus 24000 hours to the present elapsed
time).
CAUTION
WARNING
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