Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED 6-1
6. MAINTENANCE
6.1 Scheduled and Unscheduled Maintenance .................................................... 6-1
6.2 Replacement of Adsorber ............................................................................... 6-1
6.3 Charging Helium Gas ..................................................................................... 6-3
Always disconnect the compressor from all sources of electrical power before performing
any maintenance procedures.
6.1 Scheduled and Unscheduled Maintenance
◇
Scheduled Maintenance
：
Replacement of the adsorber
(every 24000 hours (maximum))
◇
Unscheduled Maintenance
：
Adding helium gas
6.2 Replacement of Adsorber
The interval between adsorber replacements must not exceed 24000 operating
hours. Exceeding the specified time may result in malfunction and/or breakdown of
the equipment.
◆Removing the Adsorber
1. Close the main valve of high vacuum system.
2. Shut down the refrigerator unit and the compressor unit.
3. Switch off the primary power.
4. Disconnect the flexible hoses from gas-return and gas-supply connectors at the
rear of the compressor unit.
5. Remove the jam nuts holding the self-sealing coupling (male) on the rear panel.
6. Remove the rear panel from the compressor by unscrewing 7 screws.
7. Disconnect the flexible hose from the adsorber inlet.
WARNING
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