Ulvac VD30C - Page 35

YK15-0009-DI-002-04
14
0
10
20
30
40
0.1 1 10 100 1000 10000 100000
Pumping Speed [m
3
/hour]
Pressure [Pa]
Gas ballast closed
Gas ballast opened
Pumping Speed (JIS B 8316/1985)
Oil :ULVOIL R-72
Gauge:Pirani
Gauge:Capasitance Manometer
VD30C 50Hz
VD30C 60Hz
VD40C 60Hz
VD40C 50Hz
Fig. 12 Pumping speed curves - MODEL VD30C/VD40C
0
20
40
60
80
100
0.1 1 10 100 1000 10000 100000
Pumping Speed [m
3
/hour]
Pressure [Pa]
Gas Ballast Closed
Gas Ballast Opened
Pumping Speed (JIS B 8316/1985)
Oil :ULVOIL R-72
Gauge:Pirani
Gauge:Capasitance Manometer
VD60C 50Hz
VD60C 60Hz
VD90C 60Hz
VD90C 50Hz
Fig. 13 Pumping speed curves - MODEL VD60C/VD90C