Ulvac VD30C - Page 75

YK15-0009-DI-002-04
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Table. 10 Main replacement parts list (VD60C/VD90C)
Material Q'ty Material Q'ty Material Q'ty Material Q'ty
For VD60C Resin (2)
For VD90C Resin (2)
22 2nd Vane For VD60C/90C Resin 2
50 O-ring
For first exhaust valve
P36
FKM 2 FKM 3 FKM 2 FKM 3
30 Gasket
For second exhaust
valve
Non asbestos
gasket
1
24
1st exhaust
valve plate
For first exhaust valve SUS 2 SUS 3 SUS 2 SUS 3
26
1st exhaust
valve spring
For first exhaust valve SUS 2 SUS 3 SUS 2 SUS 3
27
2nd exhaust
valve plate
For first exhaust valve SUS 2
56 O-ring AS568-274 FKM 1
48 O-ring P10A FKM 1
51 O-ring P48 FKM 1
52 O-ring S8 FKM 3
53 O-ring S18 FKM 1
54 O-ring S60 FKM 1
55 O-ring S120 FKM 3
Inlet
port
101 O-ring V70 FKM 1
Outlet
Port
47 O-ring V55 FKM 1
50 O-ring P36 FKM 1
49 O-ring P18 FKM 1
Oil
separating
34 Gasket For Oil separating FKM 1
Coupling 82
Coupling
Spider
ABSO-FLEX MARKⅡ
M-90
Special
rubber
1
Oil Level
Guage
7
Oil Level
Guage ASS'Y
FEP/FKM 1
Glass/
FKM
1
Parts No.
57
21
← ←
Location Description
VD60C VD90C VD60C-H
Specification
←
Shaft
1st Vane
← ← ←
← ← ←
← ← ←Oil seal FKM 3
←
← ←
← ←
←← ←
← No Need
Plug
← ← ←
← ← ←
← ← ←
Cylinder
← ← ←
← ← ←
← ← ←
← ← ←
← ← ←
← ← ←
← ← ←
← ← ←
Exhaust
valve
← ← ←
VD90C-H