6 Conguraon and calibraon
43
0 10 20 30 40 50 60 70 80 90 100 110 120
Time [s]
52
54
56
58
60
62
64
66
CONC [%]
0.05 /s
0.2 /s
0.5 /s
Figure 6.3 Slew rate damping
6.2.1 External hold
EXTERNAL
HOLD
6.2.2 Hold during wash
ACTIVE
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