VAT 64246-UEHC-0001 - Connection Overview

INSTALLATION
Series 642
16/73
Edition 2013-08-22
603685EA
4.2.2 Connection overview
System:
M
3
4
5
6
7
2
1
9
8
10
11
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable(s)
6 Cable to Logic remote control unit
7 Cable to power supply
8 Controller
9 Connection cable controller / actuator
10 Actuator
11 Pump
Actuator
Controller