VAT 64246-UEHC-0001 - Valve Unit

Series 642
DESCRIPTION OF PRODUCT
603685EA
Edition 2013-08-22
7/73
1.6.2 Valve unit
Valve unit
Pressure range at 20 C
1 × 10E-8 mbar to 2 bar (abs)
Leak rate to outside at 20 C
1 × 10E-9 mbar l/s
Leak rate valve seat at 20 C
1 × 10E-9 mbar l/s
Cycles until first service
- Throttling cycles (open - max. throttle - open)
- Isolation cycles (open - closed - open)
2’000’000 (unheated and under clean conditions)
200’000 (unheated and under clean conditions)
Admissible operating temperature
+10°C to +150°C
Mounting position
valve sit (valve seat to face chamber is recommended)
Process side materials
body
Stainless steel 316L (1.4404 or 1.4435)
plate
Stainless steel 316L (1.4404 or 1.4435)
other parts
Aluminum: A356 (3.2371)
Stainless steel: 301 (1.4310), 303 (1.4305), 304 (1.4301
or 1.4303), 316L (1.4435 or 1.4404), A2 (304)
Seals
plate
FKM (e.g. Viton®)
rotary feedthrough
FKM (e.g. Viton®)
bonnet (vulcanized)
FKM (e.g. Viton®)
Max. differential pressure on plate during isolation
2 bar in either direction
Max. differential pressure on plate
during opening and throttling
30 mbar
Min. controllable conductance
(N
2
molecular flow)
2 l/s
Max. controllable conductance
(N
2
molecular flow)
12000 l/s
Dimensions
Refer to dimensional drawing of specific valve ordering
number
(available on request)