4.6.6 Tuning of control performance
Normally the default settings will result in good pressure control performance. For some applications
tuning may be required to improve performance. The tuning procedures for each parameter (grey boxes)
and its default values are described separately below. Strictly keep the procedure order.
Required information for support:
Go to ‘Tools / Create Diagnostic File’ in ‘Control View’ resp. ‘Control Performance Analyzer’ and save
file
Pressure / flow / gas conditions to be controlled
Chamber volume
Pumping speed (l/s) and pump type (e.g. turbo pump)
System description
Problem description
Send diagnostic file with and all required information to tuning-support@vat.ch
Set all
paramters to
default