Yamato DP23C - Vacuumizing and Air Intake

30
Operation Method
Vacuumizing and air intake
Exhaust speed regulating
valve
Intake Speed
Max
Min
Intake speed regulating
valve
Vacuumizing:
1） Turn the intake speed regulating valve CW to its end (close);
2） Turn the exhaust speed regulating valve CCW to its end, the
exhaust speed is max. here;
3） Turn on vacuum pump for vacuumizing.
Air intake:
1) Turn the exhaust speed regulating valve CW to its end (close);
2) Turn off vacuum pump;
3) Slowly turn the intake speed regulating valve CCW to its end,
the intake speed is max. here;
4) The door of chamber is unable to be opened when the inside
pressure resumed to atmosphere pressure.
 The operation procedures must be strictly followed.
exhaust Speed
Max
Min