41
DPC temperature /Pressure falling curve
0
100
0.1
1
10
0.01
(kPa
)
Pump exhaust 50L/min
Pump exhaust 260L/min
(kPa)
0.01
10
1
0.1
100
0
0.1
1000
5 10 15
DP43C/63Cpressure falling characteristics
time(min)
Vaccum Degree(TOrr)
1
10
100
DP63C
DP43C
0 5 10 15
DP23C/33C temperature falling
characteristics( center of furnace)
[Vaccum state 1Torr (0.1kPa)以下]
time(hour)
temp()
100
200
240
DP33C
DP23C
DP43C
DP63C
150
100
50
temp()
time(hour)
[Vaccum state 1Torr (0.1kPa)以下]
15
10
50
200
DP23C
DP33C
100
10
1
time(min
)
DP23C/33C pressure falling characteristics
15 10 5
1000
0.1
DP43C/63C temperature falling
characteristics(center of furnace)
Vaccum Degree(TOrr)